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Eddy current measurement of the thickness of top Cu film of the multilayer interconnects in the integrated

Zilian QU,Yonggang MENG,Qian ZHAO

Frontiers of Mechanical Engineering 2015, Volume 10, Issue 1,   Pages 1-6 doi: 10.1007/s11465-015-0325-2

Abstract:

This paper proposes a new eddy current method, named equivalent unit method (EUM), for the thicknessmeasurement of the top copper film of multilayer interconnects in the chemical mechanical polishingthickness.By subtracting this equivalent film component, the accuracy of the thickness measurement of the top copperlayer with an eddy current sensor is improved and the absolute error is 3 nm for sampler measurement

Keywords： CMP     eddy current     multilayer wafer     Cu interconnects     equivalent unit    

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Retrospect and Prospect of Study on Thin Film Lubrication

Ge Jianbin,Zhang Chaohui,Wen Shizhu

Strategic Study of CAE 2003, Volume 5, Issue 7,   Pages 84-89

Abstract:

Thin film lubrication (TFL) has been well studied as a new lubrication regime since the 90s of lastof TFL, which involves the origin of the TFL concept, advancement of measuring technique, TFL's film-forming

Keywords： thin film lubrication     ordered film     film thickness measurement     microstructure    

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Numerical simulation of liquid falling film on horizontal circular tubes

Fengdan SUN, Songlin XU, Yongchuan GAO

Frontiers of Chemical Science and Engineering 2012, Volume 6, Issue 3,   Pages 322-328 doi: 10.1007/s11705-012-1296-z

Abstract: The objective of this study is to investigate numerically the flow characteristics of falling film onThe volume of fluid method is used to track the motion of liquid falling film and the gas-liquid interfaceThe velocity distribution and the film thickness characteristics on the top tube, some special flow characteristicsthickness depends on flow rate and angular distributions, 3) the flow characteristics of the top tubeare distinguished, and 5) the liquid feed height plays an important role on the formation of falling film

Keywords： falling film     horizontal tube     flow characteristics     film thickness     liquid feeder height    

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Time of flight improved thermally grown oxide thickness measurement with terahertz spectroscopy

Frontiers of Mechanical Engineering 2022, Volume 17, Issue 4, doi: 10.1007/s11465-022-0705-3

Abstract: However, the invisibility of ceramic/thermally grown oxide (TGO) reflective wave leads to the measurementfailure of natural growth TGO whose thickness is below 10 μm in TBCs.To detect and monitor TGO in the emergence stage, a time of flight (TOF) improved TGO thickness measurementThus, the TGO thickness could be obtained efficiently from the TOF increment of the monitor area withThe averaged error of 1.61 μm in experimental results demonstrates the highly accurate and robust measurement

Keywords： thermal barrier coatings     thermally grown oxide     terahertz spectroscopy     time of flight    

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Dynamic analysis of free-surface thin film flows driven by gravity over undulated substrate

Zhaomiao LIU, Xin LIU, Guobin WANG, Hong LIAO,

Frontiers of Mechanical Engineering 2010, Volume 5, Issue 2,   Pages 219-225 doi: 10.1007/s11465-010-0010-4

Abstract: This paper studies thin film flows with free surfaces driven by gravity through two types of undulatedcommenced from Navier-Stokes equations and continuity equation, the exact numerical results of free-surface filmfrom the waviness of the substrate planes profile, height of the triangle plane, and change of the filmheight on film flow dynamics properties are shown.

Keywords： waviness     triangle height     film thickness     streamlines separation     vortex    

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Experimental studies of ash film fractions based on measurement of cenospheres geometry in pulverized

Siqi LIU, Yanqing NIU, Liping WEN, Yang LIANG, Bokang YAN, Denghui WANG, Shi’en HUI

Frontiers in Energy 2021, Volume 15, Issue 1,   Pages 91-98 doi: 10.1007/s11708-020-0806-9

Abstract: In pulverized coal particle combustion, part of the ash forms the ash film and exerts an inhibitory influenceDespite the considerable ash effects on combustion, the fraction of ash film still remains unclear.that the formation of cenospheres is based on the model of coal particles with the visco-plastic ash filmThe fraction of ash film is the ratio of the measuring mass of ash film and the total ash in coal particleThe high fraction of ash film provides a reasonable explanation for the extinction event at the late

Keywords： ash film fraction     cenospheres     coal combustion     fly ash    

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Effects of sheet thickness and material on the mechanical properties of flat clinched joint

Chao CHEN, Huiyang ZHANG, Shengdun ZHAO, Xiaoqiang REN

Frontiers of Mechanical Engineering 2021, Volume 16, Issue 2,   Pages 410-419 doi: 10.1007/s11465-020-0618-y

Abstract: In this paper, the effects of sheet thickness and material on the mechanical properties of the clinchedAl1060 and Al2024 sheets with 2 mm thickness were employed to develop the clinched joint by using differentsheets with 2.5- and 1.5-mm thicknesses were used to produce the clinched joint by using different thicknessThe flat clinching process has a great potential in joining dissimilar and various thickness materials

Keywords： clinched joint     flat clinching process     thickness configuration     material configuration     mechanical property    

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Lamellar thickness transition of melt-crystallized polybuten-1 tetragonal phase: configurational change

Motoi YAMASHITA

Frontiers of Chemical Science and Engineering 2009, Volume 3, Issue 1,   Pages 26-32 doi: 10.1007/s11705-009-0002-2

Abstract: Lamellar crystal thickness of isotactic polybutene-1 ( -PB1) have been investigated for crystallizationThe crystal thickness demonstrates two linear dependences on inverse supercooling and a transition

Keywords： isotactic polybutene-1     tetragonal phase     crystal thickness     melt growth     chain folding     small angle X-ray    

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Modeling of the minimum cutting thickness in micro cutting with consideration of the friction around

Tianfeng ZHOU, Ying WANG, Benshuai RUAN, Zhiqiang LIANG, Xibin WANG

Frontiers of Mechanical Engineering 2020, Volume 15, Issue 1,   Pages 81-88 doi: 10.1007/s11465-019-0561-y

Abstract: modeling between the tool and the workpiece plays an important role in predicting the minimum cutting thicknessand clearance faces of the tool; and predict the stagnation point location and the minimum cutting thicknessapplied to calculate the stagnation point location on the edge face and predict the minimum cutting thicknessThe stagnation point and the minimum cutting thickness are also observed and illustrated in the FEM simulationcutting experiments are conducted to validate the accuracy of the friction and the minimum cutting thickness

Keywords： tool friction     minimum cutting thickness     finite element method     tool edge radius     micro cutting    

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Numerical simulation of compaction parameters for sand-filled embankment using large thickness sand filling

Wentao WANG, Chongzhi TU, Rong LUO

Frontiers of Structural and Civil Engineering 2018, Volume 12, Issue 4,   Pages 568-576 doi: 10.1007/s11709-017-0444-4

Abstract: a new technique of highway sand embankment filling in Jianghan Plain district, which can raise the thicknessThe simulation results indicate that the sand-filled layer thickness of 70 cm is suitable for the new

Keywords： sand embankment     compaction in large thickness     numerical simulation     small size vibratory roller     steady    

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Determining the optimum economic insulation thickness of double pipes buried in the soil for district

Fating LI, Pengfei JIE, Zhou FANG, Zhimei WEN

Frontiers in Energy 2021, Volume 15, Issue 1,   Pages 170-185 doi: 10.1007/s11708-020-0680-5

Abstract: The insulation thickness (IT) of double pipes buried in the soil (DPBIS) for district heating (DH) systemsAn optimization model to obtain the optimum insulation thickness (OIT) and minimum annual total cost

Keywords： double pipes     optimization model     optimum insulation thickness     minimum annual total cost    

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density measurement for plastic injection molding via ultrasonic technology

Frontiers of Mechanical Engineering 2022, Volume 17, Issue 4, doi: 10.1007/s11465-022-0714-2

Abstract: Therefore, in-situ density measurement is of great interest and has significant application valueThis study is the first to propose an in-situ density measurement method using ultrasonic technologyThe proposed method has the advantages of in-situ measurement, non-destructive, high accuracy,

Keywords： ultrasonic measurement     melt density     in-situ measurement     injection molding    

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Genome-wide association study of the backfat thickness trait in two pig populations

Dandan ZHU,Xiaolei LIU,Rothschild MAX,Zhiwu ZHANG,Shuhong ZHAO,Bin FAN

Frontiers of Agricultural Science and Engineering 2014, Volume 1, Issue 2,   Pages 91-95 doi: 10.15302/J-FASE-2014005

Abstract: Backfat thickness is a good predictor of carcass lean content, an economically important trait, and aIn this study, the candidate genes and genomic regions associated with the tenth rib backfat thicknessThe results indicated that genetic mechanism regulating backfat thickness is complex, and that genome-wide

Keywords： backfat thickness     SNP chip     genome-wide association study     compressed mixed linear model     pig    

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Experiment and optimal design of a collection device for a residual plastic film baler

Qi NIU,Xuegeng CHEN,Chao JI,Jie WU

Frontiers of Agricultural Science and Engineering 2015, Volume 2, Issue 4,   Pages 347-354 doi: 10.15302/J-FASE-2015077

Abstract: It is imperative to carry out research on residual plastic film collection technology to solve the seriousThe residual plastic film baler was designed as a package for film strip collection, cleaning and balingand the impurity of film package.The results show that the factors affecting the collection rate of residual film and the impurity ofwas 88.9% and the impurity of residual film package was 14.2% for the baler.

Keywords： residual film     collection device     collection rate of residual film     impurity of film package     optimization    

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Optimizing environmental insulation thickness of buildings with CHP-based district heating system based

Yumei ZHANG, Pengfei JIE, Chunhua LIU, Jing LI

Frontiers in Energy 2022, Volume 16, Issue 4,   Pages 613-628 doi: 10.1007/s11708-020-0700-5

Abstract: The increase of insulation thickness (IT) results in the decrease of the heat demand and heat mediumA mathematical model on the optimum environmental insulation thickness (OEIT) for minimizing the annual

Keywords： optimum environmental insulation thickness     heat medium temperature     energy grade     extracted heat     exhaust    

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Title Author Date Type Operation

Eddy current measurement of the thickness of top Cu film of the multilayer interconnects in the integrated

Zilian QU,Yonggang MENG,Qian ZHAO

Journal Article

Retrospect and Prospect of Study on Thin Film Lubrication

Ge Jianbin,Zhang Chaohui,Wen Shizhu

Journal Article

Numerical simulation of liquid falling film on horizontal circular tubes

Fengdan SUN, Songlin XU, Yongchuan GAO

Journal Article

Time of flight improved thermally grown oxide thickness measurement with terahertz spectroscopy

Journal Article

Dynamic analysis of free-surface thin film flows driven by gravity over undulated substrate

Zhaomiao LIU, Xin LIU, Guobin WANG, Hong LIAO,

Journal Article

Experimental studies of ash film fractions based on measurement of cenospheres geometry in pulverized

Siqi LIU, Yanqing NIU, Liping WEN, Yang LIANG, Bokang YAN, Denghui WANG, Shi’en HUI

Journal Article

Effects of sheet thickness and material on the mechanical properties of flat clinched joint

Chao CHEN, Huiyang ZHANG, Shengdun ZHAO, Xiaoqiang REN

Journal Article

Lamellar thickness transition of melt-crystallized polybuten-1 tetragonal phase: configurational change

Motoi YAMASHITA

Journal Article

Modeling of the minimum cutting thickness in micro cutting with consideration of the friction around

Tianfeng ZHOU, Ying WANG, Benshuai RUAN, Zhiqiang LIANG, Xibin WANG

Journal Article

Numerical simulation of compaction parameters for sand-filled embankment using large thickness sand filling

Wentao WANG, Chongzhi TU, Rong LUO

Journal Article

Determining the optimum economic insulation thickness of double pipes buried in the soil for district

Fating LI, Pengfei JIE, Zhou FANG, Zhimei WEN

Journal Article

density measurement for plastic injection molding via ultrasonic technology

Journal Article

Genome-wide association study of the backfat thickness trait in two pig populations

Dandan ZHU,Xiaolei LIU,Rothschild MAX,Zhiwu ZHANG,Shuhong ZHAO,Bin FAN

Journal Article

Experiment and optimal design of a collection device for a residual plastic film baler

Qi NIU,Xuegeng CHEN,Chao JI,Jie WU

Journal Article

Optimizing environmental insulation thickness of buildings with CHP-based district heating system based

Yumei ZHANG, Pengfei JIE, Chunhua LIU, Jing LI

Journal Article